Post-FIB TEM Sample Preparation Using A Low Energy Argon Beam
نویسندگان
چکیده
Despite the significant advances in the transmission electron microscope (TEM), such as application of aberration correction and monochromation [1], sample preparation is still one of the most critical steps determining the quality, and precision of the results. The important challenge here is to prepare samples that are thin enough for electron transparency, free from any surface damage and also have negligible surface roughness. The presence of any surface artifact would make both the interpretation of the image and the chemical analysis difficult or impossible.
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